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High-Resolution (HR) mode is mainly suited for single crystals, nearly perfect epitaxial layers as well as textured epitaxial layers. This mode can be used for w/2q scan, rocking curve (w scan), and reciprocal space mapping. In X-ray Lab HR measurements can be done on PANalytical X'Pert 1 diffractometer using the following optics: Incident Beam: PreFix Hybrid Monochromator Diffracted Beam: Triple Axis/Rocking Curve (TA/RC) attachment RC part consists of receiving slit Triple Axis part carries an analyzer crystal Incident beam monochromator significantly reduces x-ray beam divergence (up to 5 arc sec for Bartels Monochromator with Ge(440) reflection). It also eliminates Ka2 line leaving only Ka1 component. High resolution monochromator is a four-crystal monochromator. The crystals have (110) surfaces and are preset for Ge(220) or Ge(440) Cu Ka1 reflections. Hybrid monochromator consists of a parabolic graded multilayer mirror (x-ray mirror) and a channel-cut Ge crystal combined in one module. By passing a slightly broader spectral range (~19 arc sec) than 4-crystal HR monochromator, the hybrid monochromator delivers much more intense parallel beam of Ka1 radiation. The Ka2 component is suppressed to a level below 0.1%. Remarks: Hybrid monochromators are less applicable for RC measurements at 2q> 90 deg. The hybrid spectral band-pass of a hybrid monochromator is broader than that of 4-crystal HR monochromator. At high 2q angles the wavelength dispersion causes broad diffraction peaks, leading to a decrease in diffractometer resolution. A small fraction of Ka2 radiation (0.05 - 0.1 %) is present in the XRD spectrum emitting from a hybrid monochromator. It may become visible during reciprocal space mapping with large dynamic range. High Resolution applications and the required equipment
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