Publications

D.D. Shin, Y. Chen, I.B. Flader, and T.W. Kenny, “Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven,” 2017 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 595-598, June 2017. Best Paper Finalist

S. Sonmezoglu, I.B. Flader, Y. Chen, D.D. Shin, T.W. Kenny, and D.A. Horsley, “Dual-resonator MEMS magnetic sensor with differential amplitude modulation,” 2017 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 814-817, June 2017.

V. Maiwald, Y. Chen, M. Müller, I.B. Flader, C. Roman, D.B. Heinz, D.D. Shin, T.W. Kenny, and C. Hierold, “Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability,” 2017 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 802-805, June 2017.

J.M.L. Miller, D.B. Heinz, I.B. Flader, Y. Chen, D.D. Shin, and T.W. Kenny, “Effective quality factor and temperature-dependence of self-oscillations in a thermal-piezoresistively pumped resonator,” 2017 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 1907-1910, June 2017. Best Paper Finalist

D.D. Gerrard, Y. Chen, G. Yu, C.D. Meinhart, S.A. Chandorkar, I.B. Flader, D.D. Shin, and T.W. Kenny, “Topology optimization for minimization of thermoelastic dissipation in MEMS resonators,” 2017 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 794-797, June 2017.

D.D. Shin, C.H. Ahn, Y. Chen, V.A. Hong, E.J. Ng, Y. Yang, and T.W. Kenny, “Electrostatic tuning of temperature coefficient of frequency of anisotropic disk-shaped resonators,” 2017 4th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 164-167, March 2017.

Y. Chen, I.B. Flader, D.D. Shin, C.H. Ahn, and T.W. Kenny, “Fabrication of wide and deep cavities for silicon MEMS devices without wafer bonding,” 2017 4th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 113-116 March 2017. Best Poster Award

S. Sonmezoglu, I.B. Flader, Y. Chen, D.D. Shin, T.W. Kenny, and D.A. Horsley, “Dual-Resonator MEMS Lorentz Force Magnetometer Based on Differential Frequency Modulation,” 2017 4th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 160-163, March 2017.

D.D. Shin, C.H. Ahn, Y. Chen, D.L. Christensen, I.B. Flader, and T.W. Kenny, “Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process,” 2017 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 17–20, Jan 2017. Best Paper Award

Y. Chen, D.D. Shin, I.B. Flader, and T.W. Kenny, “Tri-mode operation of highly doped silicon resonators for temperature compensated timing references,” 2017 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1158–1161, Jan 2017.

I.B. Flader, Y. Chen, D.D. Shin, D.B. Heinz, L.C. Ortiz, A.L. Alter, W. Park, K.E. Goodson, and T.W. Kenny, “Micro-tethering for in-process stiction mitigation of highly compliant structures,” 2017 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 675–678, Jan 2017.

D.D. Gerrard, J. Rodriguez, I.B. Flader, L.C. Ortiz, Y. Chen, D.D. Shin, T.W. Kenny, “Manipulation of heat flux paths in thermo-elastically damped resonators for Q optimization,” 2017 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.1130–1133, Jan 2017.

P. Taheri-Tehrani, Y. Chen, I.B. Flader, D.D. Shin, T.W. Kenny, and D.A. Horsley, “Epitaxially-encapsulated quad mass resonator with shaped comb fingers for frequency tuning,” 2017 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1111–1114, Jan 2017.

C.H. Ahn, D.D. Shin, V.A. Hong, E.J. Ng, Y. Yang, Y. Chen, I.B. Flader, and T.W. Kenny, “Encapsulated disk resonator gyroscope with differential internal electrodes,” 2016 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 962–965, Jan 2016.

Y. Chen, E.J. Ng, D.D. Shin, C.H. Ahn, Y. Yang, I.B. Flader, V.A. Hong, and T.W. Kenny, “Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators,” 2016 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 91–94, Jan 2016. Best Paper Award

V.A. Hong, D.B. Heinz, D.L. Christensen, D.D. Shin, Y. Chen, C.H. Ahn, Y. Yang, E.J. Ng, I.B. Flader, and T.W. Kenny, “Overcoming stiction forces with resonant over-travel stops,” 2016 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 47–50, Jan 2016. Best Paper Finalist